Design and Fabrication of the Suspended High-Q Spiral Inductors with X-Beams

In this paper, deep sub-micron CMOS process compatible high Q on chip spiral inductors with air gap structure were designed and fabricated. In the design the electromagnetic solver, SONNET, and the finite element program, ANSYS, were used for electrical-characteristics and maximum mechanical strength, respectively. The copper wires were capped with electroless Ni plating to prevent the copper from oxidizing. A Si3N4/ SiO2 X-beam was designed to increase the mechanical strength of the inductor in air gap. The enhancement of maximum mechanical strength of a spiral inductor with X-beams is more than 4500 times. Among these structures, the measured maximum quality factor (Q) of the suspending inductor and frequency at

• Type: Journal
• Year: 2008
• Where: CORR
• Authors: M. C. Hsieh, D. K. Jair, Y. K. Fang, C. S. Lin
• Keywords: Air Gap, CORR 2008, Education, Maximum Mechanical Strength, Spiral Inductor