RF-MEMS Switched Varactors for Medium Power Applications

In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched capacitors with an enhanced topology is presented in this paper to prevent it. This kind of device and its promising performances will serve to fabricate a MEMS based phase shifter able to work under several watts.

• Type: Journal
• Year: 2008
• Where: CORR
• Authors: F. Maury, Arnaud Pothier, A. Crunteanu, F. Conseil, Pierre Blondy
• Keywords: CORR 2008, Education, Medium Power Applications, Mems, Micro ElectroMechanical Systems