As CMOS technology is scaled down toward the nanoscale regime, drastically growing leakage currents and variations in device characteristics are becoming two important design challenges. Traditionally, the device-design methodology is based on finding the device parameters which minimize the leakage current while providing a minimum saturation current for the transistor. This methodology may change when variations are accounted for design. In this paper, a novel device optimization methodology is presented that incorporates variability awareness into the device-design flow such that the designed device satisfies desired bounds on total leakage, saturation current, and intrinsic delay under parameter variabilities. The technique locates the maximum-yield rectangular cube in the 5-D feasible space composed of oxide-thickness, gate-length, and channel-doping profile parameters. The center of this cube is considered as the maximum-yield design point with the highest immunity against variat...