In this paper we address the the growing issue of junction tunneling leakage (Ijunc) at the circuit level. Specifically, we develop a fast approach to analyze the state-dependent total leakage power of a large circuit block, considering Ijunc, subthreshold leakage (Isub), and gate oxide leakage (Igate). We then propose our algorithm to estimate the full-chip leakage power with consideration of both Gaussian and nonGaussian parameter distributions, capturing spatial correlations using a grid-based model. Experiments on ISCAS85 benchmarks demonstrate that the estimated results are very accurate and efficient. For a circuit with G gates, the complexity of our approach is O(G). Categories and Subject Descriptors B.8.2 [Performance and Reliability]: Performance Analysis and Design Aids General Terms Algorithm, Design, Performance, Reliability Keywords Statistical analysis, junction tunneling leakage, Gaussian and non-Gaussian parameter distributions