Scheduling for Dedicated Machine Constraint Using Integer Programming

We propose an Integer Programming (IP) framework to undertake the dedicated photolithography machine constraint in semiconductor manufacturing. The constraint is one of the new challenges set by the process engineer in semiconductor manufacturing due to natural bias of photolithography machines. Previous researches either did not take the constraint into account or the proposed heuristic approach might not efficiently fit the fast-changing market of semiconductor manufacturing. In this paper, the proposed IP framework provides an approach to minimize the production cost in an efficient time. We also present the experiments to validate the approach.

• Type: Conference
• Year: 2008
• Where: ICTAI
• Authors: Huy Nguyen Anh Pham, Arthur M. D. Shr, Peter P. Chen, Alan Liu
• Keywords: Artificial Intelligence, ICTAI 2008, Photolithography Machine Constraint, Photolithography Machines, Semiconductor Manufacturing