We show for several planar and geometric problems that the best known approximation schemes are essentially optimal with respect to the dependence on ǫ. For example, we show that the 2O(1/ǫ) · n time approximation schemes for planar MAXIMUM INDEPENDENT SET and for TSP on a metric defined by a planar graph are essentially optimal: if there is a δ > 0 such that any of these problems admits a 2O((1/ǫ)1−δ ) nO(1) time PTAS, then the Exponential Time Hypothesis (ETH) fails. It is known that MAXIMUM INDEPENDENT SET on unit disk graphs and the planar logic problems MPSAT, TMIN, TMAX admit nO(1/ǫ) time approximation schemes. We show that they are optimal in the sense that if there is a δ > 0 such that any of these problems admits a 2(1/ǫ)O(1) nO((1/ǫ)1−δ ) time PTAS, then ETH fails.