A CMOS potentiostat for control of integrated MEMS actuators

— We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-ona-chip to confine cells and measure signals from them. The design has been fabricated in a commercially available 0.5 µm CMOS process. The fabricated chip has been employed for the control of off-chip electroactive polymer films and micro-actuators.

• Type: Conference
• Year: 2006
• Where: ISCAS
• Authors: S. B. Prakash, Pamela Abshire, M. Urdaneta, M. Christophersen, Elisabeth Smela
• Keywords: ISCAS 2006, Off-chip Electroactive Polymer, Situ Electrochemical Control, µm Cmos Process