Contact Mechanics Description of Inelastic Displacement Response of a Nano-Positioning Device

– A classical mechanistic model was developed to capture the existence of pre-sliding tangential deflection (PSTD) in contacting polysilicon and coated polysilicon surfaces. For the purposes of modeling asperity friction, experiments have shown, and been supported through detailed finite element analyses, that frictional forces developed through tangential sliding scale linearly through a material parameter known as the junction strength. A junction strength model coupled with a discrete quasi-static contact mechanics analysis, using contacting surface descriptions sampled by AFM from actual polysilicon surfaces, predicts inelastic tangential displacements that are qualitatively consistent with observed PSTD response. The simulations imply that the existence of PSTD depends not only on the spatial characteristics of contacting surfaces, but also on the local loading characteristics.

• Type: Conference
• Year: 2005
• Where: ICMENS
• Authors: Michael J. Starra, E. David Reedy, Alex D. Corwina, Robert W. Carpick, Erin E. Flater
• Keywords: Actual Polysilicon Surfaces, Hardware, ICMENS 2005, Polysilicon Surfaces, Pre-sliding Tangential Deflection