ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
Abstract— In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. T...
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
– A classical mechanistic model was developed to capture the existence of pre-sliding tangential deflection (PSTD) in contacting polysilicon and coated polysilicon surfaces. For ...
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
Inertial displacement sensors employing currently available high performance micromachined accelerometers and gyroscopes measure position and attitude with sub-micron accuracy for ...
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator located over the edge of a circular silicon diaphragm. As the diaphragm deflec...
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q...
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
The influence of thermal effects on the reliability of RF MEMS switches is investigated in this paper. Low power consumption and capacity to handle high power at very high frequen...
ICMENS
2005
IEEE
14 years 8 months ago
2005
IEEE
The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is appli...