Future Challenges for MEMS Failure Analysis

MEMS processes and components are rapidly changing in device design, processing, and, most importantly, application. This paper will discuss the future challenges faced by the MEMS failure analysis as the field of MEMS (fabrication, component design, and applications) grows. Specific areas of concern for the failure analyst will also be discussed.

• Type: Conference
• Year: 2003
• Where: ITC
• Authors: Jeremy A. Walraven
• Keywords: Hardware, ITC 2003, Mems, MEMS Failure Analysis, MEMS Processes