Generation of design guarantees for interconnect matching

Manufacturable design requires matching of interconnects which have equal nominal dimensions. New design rules are projected to bring guarantee rules for interconnect matching. In this paper, we present a methodology to generate additional guarantees given the limited set of guarantees in the design manual. In order to achieve this, we propose a multi-function optimization method to extract parameters of a preliminary dimension- and distance-based process correlation model for interconnects. We propose an interconnect matching extraction method and suitable patterns useful for mismatch extraction. We have extracted matching guarantees while also considering the special case of edge matching using Monte Carlo analysis and field solvers. We have substantiated the experimentation with evaluations on a preliminary regression model and metric for mismatch. Categories and Subject Descriptors J.6 [Computer-Aided Engineering]: [CAM, CAD] General Terms design, algorithms Keywords interconnect...

• Type: Conference
• Year: 2006
• Where: SLIP
• Authors: Andrew B. Kahng, Rasit Onur Topaloglu
• Keywords: Computer Networks, Interconnect, Interconnect Matching, Interconnect Matching Extraction, SLIP 2006