A green function-based parasitic extraction method for inhomogeneous substrate layers

This paper presents a new Green function-based approach for substrate parasitic extraction in substrates with inhomogeneous layers. This new formulation allows analysis of noise coupling with sinkers, trenches and wells, - a limitation in prior Green function-based extractors. Numerical examples for sinkers and trenches are provided and compared with the results from threedimensional semiconductor device simulations. It is shown that the proposed method is accurate and computationally efficient. Categories and Subject Descriptors B7.2 [Integrated Circuits]: Design Aids - Simulation, Verification. General Terms Algorithms. Keywords Substrate noise, parasitic extraction, Green function.

• Type: Conference
• Year: 2005
• Where: DAC
• Authors: Chenggang Xu, Ranjit Gharpurey, Terri S. Fiez, Kartikeya Mayaram
• Keywords: Computer Architecture, DAC 2005, Green Function-based Approach, Parasitic Extraction, Substrate Parasitic Extraction