—X-filling is preferred for low-capture-power scan test generation, since it reduces IR-drop-induced yield loss without the need of any circuit modification. However, the effectiveness of previous X-filling methods suffers from lack of guidance in selecting targets and values for X-filling. This paper addresses this problem with a highly-guided X-filling method based on two novel concepts: (1) X-score for X-filling target selection and (2) probabilistic weighted capture transition count for X-filling value selection. Experimental results show the superiority of the new X-filling method for capture power reduction.