Implantable MEMS Accelerometer Microphone for Cochlear Prosthesis

—A MEMS accelerometer is proposed as an implantable middle ear microphone for future fully implantable cochlear prosthesis. Vibration characterization of human temporal bones by using laser Doppler vibrometer indicates that a MEMS accelerometer needs to achieve a sensing resolution of 75 µg Hz with a bandwidth of 10 kHz to detect normal conversation. A prototype MEMS accelerometer is designed and fabricated. When interfaced with a low noise CMOS capacitance-to-voltage converter, the sensor achieves a sensing resolution of 78 µg Hz at 500 Hz with a sensitivity of

• Type: Conference
• Year: 2007
• Where: ISCAS
• Authors: Darrin J. Young, Mark A. Zurcher, Wen H. Ko, Maroun Semaan, Cliff A. Megerian
• Keywords: ISCAS 2007, MEMS Accelerometer, Prototype Mems Accelerometer, —a Mems Accelerometer