A review of scheduling theory and methods for semiconductor manufacturing cluster tools

Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication processes. We review tool architectures, operational issues, and scheduling requirements. We then explain recent progress in tool science and engineering for scheduling and control of cluster tools.

• Type: Conference
• Year: 2008
• Where: WSC
• Authors: Tae-Eog Lee
• Keywords: Cluster Tools, Modeling And Simulation, Single-wafer Processing Modules, Wafer Handling Robots, WSC 2008