WSC
2008
14 years 2 months ago
2008
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
WSC
2007
14 years 2 months ago
2007
Cluster tools are representatives of a special kind of tool where process times of jobs depend on the combination in which they are processed together on the tool and hence, depen...