Steady-State Throughput and Scheduling Analysis of Multicluster Tools: A Decomposition Approach

Abstract--Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, research work on multicluster tools is still at an early stage. In this paper, we analyze steady-state throughput and scheduling of multicluster tools. We consider the case where all wafers follow the same visit flow within a multicluster tool. We propose a decomposition method that reduces a multicluster tool problem to multiple independent singlecluster tool problems. We then apply the existing and extended results of throughput and scheduling analysis for each single-cluster tool. Computation of lower-bound cycle time (fundamental period) is presented. Optimality conditions and robot schedules that realize such lower-bound values are then provided using "pull" and "swap" strategies for single-blade and double-blade robots, respectively. For an -cluster tool, we present ( ) lower-bound cycle time...

• Type: Journal
• Year: 2008
• Where: TASE
• Authors: Jingang Yi, Shengwei Ding, Dezhen Song, Mike Tao Zhang
• Keywords: Multicluster Tools, Robot, Software Engineering, TASE 2008, Tool