Transistor-Specific Delay Modeling for SSTA

SSTA has received a considerable amount of attention in recent years. However, it is a general rule that any approach can only be as accurate as the underlying models. Thus, variation models are an important research topic, in addition to the development of statistical timing tools. These models attempt to predict fluctuations in parameters like doping concentration, critical dimension (CD), and ILD thickness, as well as their spatial correlations. Modeling CD variation is a difficult problem because it contains a systematic component that is context dependent as well as a probabilistic component that is caused by exposure and defocus variation. Since these variations are dependent on topology, modern-day designs can potentially contain thousands of unique CD distributions. To capture all of the individual CD distributions within statistical timing, a transistor-specific model is required. However, statistical CD models used in industry today do not distinguish between transistors con...

• Type: Conference
• Year: 2008
• Where: DATE
• Authors: Brian Cline, Kaviraj Chopra, David Blaauw, Andres Torres, Savithri Sundareswaran
• Keywords: CD Distributions, DATE 2008, Hardware, Statistical Cd Models, Statistical Timing