As the scale and complexity of VLSI circuits increase, Electronic Design Automation (EDA) tools become much more sophisticated and are held to increasing standards of quality. New...
The transition to 300mm wafer size introduced a lot of new technologies to wafer fabrication facilities that mandated the presence of intrabay automated material handling systems ...
In this paper, the specification of Verity, a webbased instructional tool, is presented. Verity is intended to be used as a learning assistant and self-assessment tool, more than ...
Sergiu Dascalu, Daniela Saru, Ryan Simpson, Justin...
Cluster or chamber tools are often used in the semiconductor industry. In a research environment, moving to smaller device dimensions requires experimentation with new chamber typ...
In this paper we describe the design of a tool supporting the integration of independently developed data warehouses, a problem that arises in several common scenarios. The basic f...