323 search results - page 4 / 65 » Automatic generation of simulation models for semiconductor ... |
WSC
2008
13 years 9 months ago
2008
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
WSC
2008
13 years 9 months ago
2008
Semiconductor industry is a capital intensive and knowledge intensive industry, in which human resource management and human capital enhancement is increasingly important. To main...
WSC
2001
13 years 8 months ago
2001
Semiconductor manufacturing is generally considered a cyclic industry. As such, individual producers able to react quickly and appropriately to market conditions will have a compe...
ICRA
2000
IEEE
13 years 12 months ago
2000
IEEE
A Robotic System is being developed to automate the crucible packing process in the CZ semiconductor wafer production. It requires the delicate manipulation and packing of highly ...
CPAIOR
2010
Springer
14 years 8 days ago
2010
Springer
We present a maintenance scheduling problem arising from semi-conductor manufacturing which is characterized by low resource contention and multiple complex objectives and prefere...