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Microarray image gridding via an evolutionary algorithm
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ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction
14 years 9 months ago
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In this paper, we present ELIAD, an efficient lithography aware detailed router to optimize silicon image after optical proximity correction (OPC) in a correct-by-construction man...
Minsik Cho, Kun Yuan, Yongchan Ban, David Z. Pan
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