48 search results - page 5 / 10 » Productivity modeling of semiconductor manufacturing equipme... |
WSC
2007
13 years 9 months ago
2007
Photolithography is generally regarded as the most constraining element in semiconductor manufacturing. This is primarily attributable to the high capital investment and extensive...
SENSYS
2005
ACM
14 years 16 days ago
2005
ACM
Sensing technology is a cornerstone for many industrial applications. Manufacturing plants and engineering facilities, such as shipboard engine rooms, require sensors to ensure pr...
TASE
2008
IEEE
13 years 6 months ago
2008
IEEE
Abstract--Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, research ...
IJCIM
2002
13 years 6 months ago
2002
This paper presents a new distributed real-time control architecture for flexibly automated production systems. The modelling assumptions underlying the design en by, and abstract,...
ATAL
2005
Springer
14 years 16 days ago
2005
Springer
The rapid changing business environment of high-tech asset intensive enterprises such as semiconductor manufacturing constantly drives production managers to look for better solut...