Emerging 3D chips stacking and MEMS/Sensors packaging technologies are using DRIE (Deep Reactive Ion Etching) to etch Through-Silicon Via (TSV) for advanced interconnections. The ...
M. Puech, Jean-Marc Thevenoud, J. M. Gruffat, N. L...
—For the description of reactive systems, there is a large number of languages and formalisms, and depending on a particular application or design phase, one of them may be bette...
Jens Brandt, Mike Gemunde, Klaus Schneider, Sandee...