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TASE
2008
IEEE
13 years 6 months ago
2008
IEEE
Abstract--Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, research ...
ECCC
2010
13 years 6 months ago
2010
We investigate the problem of local reconstruction, as defined by Saks and Seshadhri (2008), in the context of error correcting codes. The first problem we address is that of me...