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    CORR
    2008
    Springer
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    Measurement of Large Forces and Deflections in Microstructures
    14 years 6 months ago
    Measurement of Large Forces and Deflections in Microstructures
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    Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural fa...
    Kai Axel Hals, Einar Halvorsen, Xuyuan Chen
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