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    ISPD
    1998
    ACM
    89views Hardware» more  ISPD 1998»
    Filling and slotting: analysis and algorithms
    14 years 3 months ago
    Filling and slotting: analysis and algorithms
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    In very deep-submicron VLSI, certain manufacturing steps – notably optical exposure, resist development and etch, chemical vapor deposition and chemical-mechanical polishing (CM...
    Andrew B. Kahng, Gabriel Robins, Anish Singh, Huij...
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