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    DATE
    2009
    IEEE
    125views Hardware» more  DATE 2009»
    On linewidth-based yield analysis for nanometer lithography
    14 years 6 months ago
    On linewidth-based yield analysis for nanometer lithography
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    — Lithographic variability and its impact on printability is a major concern in today’s semiconductor manufacturing process. To address sub-wavelength printability, a number of...
    Aswin Sreedhar, Sandip Kundu
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