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    1998
    90views Modeling And Simulation» more  WSC 1998»
    A Rapid Modeling Technique for Measurable Improvements in Factory Performance
    14 years 7 days ago
    A Rapid Modeling Technique for Measurable Improvements in Factory Performance
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    This paper discusses a methodology for quickly investigating problem areas in semiconductor wafer fabrication factories by creating a model for the production area of interest onl...
    Andreas Peikert, Josef Thoma, Steven Brown
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