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WSC
1998

A Rapid Modeling Technique for Measurable Improvements in Factory Performance

14 years 29 days ago
A Rapid Modeling Technique for Measurable Improvements in Factory Performance
This paper discusses a methodology for quickly investigating problem areas in semiconductor wafer fabrication factories by creating a model for the production area of interest only (as opposed to a model of the complete factory operation). All other factory operations are treated as "black boxes". Specific assumptions are made to capture the effect of reentrant flow. This approach allows a rapid response to production questions when beginning a new simulation project. The methodology was applied to a cycle-time and capacity analysis of the photolithography operation for Siemens' Dresden wafer fab. The results of this simulation study are presented.
Andreas Peikert, Josef Thoma, Steven Brown
Added 01 Nov 2010
Updated 01 Nov 2010
Type Conference
Year 1998
Where WSC
Authors Andreas Peikert, Josef Thoma, Steven Brown
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