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ASPDAC
2000
ACM
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14 years 3 months ago
High performance of short-channel MOSFETs due to an elevated central-channel doping
— An elevated central-channel doping with a depth similar to the S/D junctions is proposed as the best measure for simultaneously improving MOSFET device and high speed circuit p...
Masayasu Tanaka, N. Tokida, T. Okagaki, Michiko Mi...