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    WSC
    1998
    156views Modeling And Simulation» more  WSC 1998»
    Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing
    14 years 1 months ago
    Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing
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    Simulation modeling provides an effective and powerful approach for capturing and analyzing complex manufacturing systems. More and more decisions are based on computer generated ...
    Nirupama Nayani, Mansooreh Mollaghasemi
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