CORR
2008
Springer
13 years 11 months ago
2008
Springer
Packaging costs of Micro-Electro-Mechanical System (MEMS) are still contributing with >50% to the total costs of most devices. Aligned wafer bonding techniques for Wafer-level ...
CASES
2007
ACM
14 years 3 months ago
2007
ACM
Micro-Electro-Mechanical Systems (MEMS) combine lithographically formed mechanical structures with electrical elements to create physical systems that operate on the scale of micr...