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24
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ICRA
2000
IEEE
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Robotics
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ICRA 2000
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Design and Implementation of a Robot Assisted Crucible Charging System
14 years 27 days ago
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robots.mit.edu
A robotic system is developed to automate the packing of polycrystalline silicon nuggets into a fragile fused silica crucible in CZ semiconductor wafer production. The highly irre...
Vivek A. Sujan, Steven Dubowsky, Yoshiaki Ohkami
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