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    2008
    115views Modeling And Simulation» more  WSC 2008»
    Simulation analysis of cluster tool operations in wafer fabrication
    14 years 1 months ago
    Simulation analysis of cluster tool operations in wafer fabrication
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    Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
    Amit Kumar Gupta, Peter Lendermann, Appa Iyer Siva...
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