Simulation analysis of cluster tool operations in wafer fabrication

Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamination and less human involvement. Perkinson et al. (1994, 1996) developed analytical models to predict the minimum theoretical time required to complete the cycle in a cluster tool. This paper addresses the verification of these analytical models using simulation. Two simulation models were developed

• Type: Conference
• Year: 2008
• Where: WSC
• Authors: Amit Kumar Gupta, Peter Lendermann, Appa Iyer Sivakumar, John Priyadi
• Keywords: Analytical Models, Cluster Tool, Modeling And Simulation, Parallel Chambers, WSC 2008