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ICRA
2000
IEEE
62views Robotics» more  ICRA 2000»
14 years 3 months ago
Design and Implementation of a Robot Assisted Crucible Charging System
A robotic system is developed to automate the packing of polycrystalline silicon nuggets into a fragile fused silica crucible in CZ semiconductor wafer production. The highly irre...
Vivek A. Sujan, Steven Dubowsky, Yoshiaki Ohkami