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MR
2006
73views Robotics» more  MR 2006»
13 years 10 months ago
Reduced temperature dependence of hot carrier degradation in deuterated nMOSFETs
Deuterated oxides exhibit prolonged hot carrier lifetimes at room temperature. We report evidence that this improved hot carrier hardness exists over the temperature range between...
Cora Salm, André J. Hof, Fred G. Kuper, Jur...
CORR
2008
Springer
52views Education» more  CORR 2008»
13 years 11 months ago
0-level Vacuum Packaging RT Process for MEMS Resonators
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is co...
Nicolas Abelé, D. Grogg, C. Hibert, F. Cass...