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126
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WSC
2007
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Modeling And Simulation
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WSC 2007
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Hierarchical distributed simulation for 300mm wafer fab
15 years 6 months ago
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www.informs-sim.org
Distributed simulation promises benefits in large-scale simulations, such as in high fidelity simulation of 300mm wafer fabs, although these benefits have been hard to achieve in ...
Sheng Xu, Leon F. McGinnis
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