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    2003
    ACM
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    A cost-driven lithographic correction methodology based on off-the-shelf sizing tools
    15 years 4 months ago
    A cost-driven lithographic correction methodology based on off-the-shelf sizing tools
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    As minimum feature sizes continue to shrink, patterned features have become significantly smaller than the wavelength of light used in optical lithography. As a result, the requir...
    Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, J...
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