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    CPHYSICS
    2007
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    Atomic-level simulation of non-equilibrium surface chemical reactions under plasma-wall interaction
    13 years 11 months ago
    Atomic-level simulation of non-equilibrium surface chemical reactions under plasma-wall interaction
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    Molecular dynamics (MD) simulations are used for the study of non-thermal-equilibrium reactions that take place on the substrate surface during plasma etching processes. In MD sim...
    Satoshi Hamaguchi, Masashi Yamashiro, Hideaki Yama...
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