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51
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ISCAS
2003
IEEE
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ISCAS 2003
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Micromachined piezoresistive tactile sensor array fabricated by bulk-etched MUMPs process
14 years 5 months ago
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The design, fabrication and testing of a 5 5 micromachined tactile sensor array for the detection of an extremely small force (micrometer-Newton range) has been discussed. An anis...
Tanom Lomas, A. Tuantranont, F. Cheevasuvit
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