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    CORR
    2007
    Springer
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    Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching
    14 years 21 days ago
    Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching
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    Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the micros...
    A. Phommahaxay, G. Lissorgues, L. Rousseau, T. Bou...
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