A typical wafer fab requires numerous decisions for daily operations. Even small decisions on system configurations may have significant impact on the overall fab performance. One...
Daniel Noack, Boon-Ping Gan, Peter Lendermann, Oli...
In this paper, multiple orders per job type formation and release strategies are described for semiconductor wafer fabrication facilities (wafer fabs). Different orders are groupe...
Jens Zimmermann, Scott J. Mason, John W. Fowler, L...
Distributed simulation promises benefits in large-scale simulations, such as in high fidelity simulation of 300mm wafer fabs, although these benefits have been hard to achieve in ...