Sciweavers

ICMENS
2005
IEEE

LIGA Cavity Resonator for K-Band Applications

14 years 4 months ago
LIGA Cavity Resonator for K-Band Applications
A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q) factor. Simulation using 3-D finite element method (FEM) shows an unloaded Q (Qu) very close to the theoretical calculation. Feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated.
Zhen Ma, David M. Klymyshyn, Sven Achenbach
Added 25 Jun 2010
Updated 25 Jun 2010
Type Conference
Year 2005
Where ICMENS
Authors Zhen Ma, David M. Klymyshyn, Sven Achenbach
Comments (0)