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ISRR
2005
Springer

Hybrid Nanorobotic Approaches to NEMS

14 years 4 months ago
Hybrid Nanorobotic Approaches to NEMS
Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from individual carbon nanotubes (CNTs) and SiGe/Si nanocoils is described. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives. Key words: nanorobotics, nanoassembly, nanomanipulation, NEMS, carbon nanotubes, nanocoils
Bradley J. Nelson, Lixin Dong, Arunkumar Subramani
Added 28 Jun 2010
Updated 28 Jun 2010
Type Conference
Year 2005
Where ISRR
Authors Bradley J. Nelson, Lixin Dong, Arunkumar Subramanian, Dominik J. Bell
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