Model Reduction for RF MEMS Simulation

Radio-frequency (RF) MEMS resonators, integrated into CMOS chips, are of great interest to engineers planning the next generation of communication systems. Fast simulations are necessary in order to gain insights into the behavior of these devices. In this paper, we discuss two structure-preserving model-reduction techniques and apply them to the frequency-domain analysis of two proposed MEMS resonator designs.

• Type: Conference
• Year: 2004
• Where: PARA
• Authors: David Bindel, Zhaojun Bai, James Demmel
• Keywords: Applied Computing, Mems Resonator, MEMS Resonator Designs, PARA 2004, Structure-preserving Model-reduction Techniques