Newton: a library-based analytical synthesis tool for RF-MEMS resonators

Newton is a library-based CAD tool with an analytical synthesis engine which has been developed to support the direct synthesis of the physical design and an electromechanically equivalent model of RF-MEMS resonators based on process parameters and performance metrics. Newton provides accuracy comparable to finite element analysis while requiring a fraction of the computation and design time. A comparison of results from synthesis with Newton, design with FEA, and test results from fabricated devices is presented.

• Type: Conference
• Year: 2006
• Where: ASPDAC
• Authors: Michael S. McCorquodale, James L. McCann, Richard B. Brown
• Keywords: Analytical Synthesis Engine, ASPDAC 2006, Direct Synthesis, Hardware, Library-based Cad Tool