Architecture for Integrated Mems Resonators Quality Factor Measurement

In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).

• Type: Journal
• Year: 2008
• Where: CORR
• Authors: Hervé Mathias, Fabien Parrain, Jean-Paul Gilles, Souhil Megherbi, Ming Zhang, Philippe Coste, Antoine Dupret
• Keywords: CORR 2008, Education, Electrical Measurement, MEMS Resonators, Quality Factor