Diaphragm design guidelines and an optical pressure sensor based on MEMS technique

The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity, and resonant frequency. According to the study, the thickness need to be thin and the side length need to be small in order to get the sensitive diaphragm with high resonant frequency. A Fabry

• Type: Journal
• Year: 2006
• Where: MJ
• Authors: Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry T. Roman, Ken K. Chin, Kenneth R. Farmer
• Keywords: MJ 2006, Pressure Sensor, Resonant Frequency, Sensor