MJ 2006 - PDF Preprint Papers

MJ 2006

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MJ
2006

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Diaphragm design guidelines and an optical pressure sensor based on MEMS technique

14 years 2 months ago

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The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity,...

Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry...

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Id	Views	Title	Status

1	173	Diaphragm design guidelines and an optical pressure sensor based on MEMS technique	claim
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18	53	Effect of nanoimprinted surface relief on Si and Ge nucleation and ordering	claim
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